Showing results 1 to 1 of 1
| Issue Year | Title | Author(s) | Type | Views | Downloads |
|---|---|---|---|---|---|
| 2020 | Experimental Investigation of the Distribution of Energy Deposited by FIB in Ion-beam Lithography | Muratov, M.; Myrzabekova, M.; Guseinov, N.; Nemkayeva, R.; Ismailov, D.; Shabelnikova, Ya.; Zaitsev, S. | Article | 4367944 | 4466858 |